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2¨蓝宝石晶片的指标
Crystal Materials (材料) High Purity, Monocrystalline Al2O3
Grade(加工等级) Prime,Epi-ready
Orientation(晶体定向) C-axis [0001] off to M-plane[1-100] 0.2°±0.05°
Diameter(直径) 50.8mm± 0.1
Thickness(厚度) 430um /-10um
Primary Flat(主定位边） A-axis[11-20] ± 0.25°
Major Flat Length (定位边长） 16.0mm± 1mm
Minor (第二定位边) N / A
Surface Finish(表面处理) Front side(正面): Epi-ready polished,Ra≤0.2nm ; Backside(背面):Fine ground ,Ra=0.4~1.2
TTV/BOW/Warp(平整度) TTV ≤10um; BOW ≤10um; Warp ≤10um
Laser Mark(激光标记) Upon Customer’s Request
Packaging（包装） 百级洁净室，氮气保护，真空包装
Vacuum packed, in a class 100 clean room, under a nitrogen atmosphere
